Mesure de champs de déplacement micrométrique d'une surface par corrélation de sa topographie

Fabien Amiot (1) , François Hild (1) , Jean Paul Roger (2)

1 LMT - Laboratoire de Mécanique et Technologie
2 LOP - Laboratoire d'Optique Physique (UPR0005)

We present an experimental set-up that allows us to measure in-plane and out-ofplane displacement fields of surfaces in reflection microscopy. This set-up is based upon a Nomarski shear-interferometer, which is used with two different Wollaston prisms. The real topography of the object is deduced and divided into mean surface and roughness. The out-of-plane displacement field is obtained by difference of mean surfaces, while the in-plane displacement field is deduced from the cross-correlation of the roughness.

Mots clés: full-field measurement; Nomarski interferometry; digital image correlation; micromechanical sensors; biosensors

Domaines: Mécanique des matériaux [physics.class-ph]; Mécanique des matériaux [physics.class-ph]; Optique / photonique

Fabien Amiot, François Hild, Jean Paul Roger. Mesure de champs de déplacement micrométrique d'une surface par corrélation de sa topographie. Instrumentation, Mesure, Métrologie, 2005, 5, pp.33-43. ⟨hal-00023349⟩