A SCANNING FLUORESCENT PROBE FOR LOCAL TEMPERATURE IMAGING OF MICROELECTRONIC CIRCUITS

L. Aigouy (1) , G. Tessier (1) , M. Mortier (2) , B. Charlot (3)

1 LSLP - Laboratoire de Spectroscopie en Lumière Polarisée
2 LCAES - Laboratoire de Chimie Appliquée de l'État Solide
3 TIMA - Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés

A fluorescent particle settled at the extremity of an atomic force microscope tip is used as a scanning temperature sensor. Since fluorescence is an effect that depends on temperature, by collecting the amount on light emitted by the particle as a function of its position on a sample, we are able to map the heat distribution on its surface. To validate the technique, we have imaged the heating of a stripe resistor.

Mots clés: Temperature scanning probe fluorescence

Domaines: Architectures Matérielles [cs.AR]

L. Aigouy, G. Tessier, M. Mortier, B. Charlot. A SCANNING FLUORESCENT PROBE FOR LOCAL TEMPERATURE IMAGING OF MICROELECTRONIC CIRCUITS. THERMINIC 2005, Sep 2005, Belgirate, Lago Maggiore, Italy. pp.220-223. ⟨hal-00189476⟩