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Conference Papers Year : 2009

An innovative NEMS pressure sensor approach based on hetero-nanostructures

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Dates and versions

hal-00603881 , version 1 (27-06-2011)

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  • HAL Id : hal-00603881 , version 1

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X. Xu, B. Bercu, F. Lime, L. Montès. An innovative NEMS pressure sensor approach based on hetero-nanostructures. 18th Materials For Advanced Metallization Conference, Mar 2009, Grenoble, France. ⟨hal-00603881⟩
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