An innovative NEMS pressure sensor approach based on hetero-nanostructures

X. Xu; B. Bercu; F. Lime; L. Montès

Conference Papers Year : 2009

An innovative NEMS pressure sensor approach based on hetero-nanostructures

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X. Xu

Function : Author

Institut polytechnique de Grenoble - Grenoble Institute of Technology

Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation

B. Bercu

Function : Author

Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation

F. Lime

Function : Author

L. Montès

Function : Author

Institut des Sciences de la Terre de Paris

Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation

Domains

Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics

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Submitted on : Monday, June 27, 2011-3:33:44 PM

Last modification on : Tuesday, February 7, 2023-2:44:46 PM

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hal-00603881 , version 1 (27-06-2011)

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HAL Id : hal-00603881 , version 1

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X. Xu, B. Bercu, F. Lime, L. Montès. An innovative NEMS pressure sensor approach based on hetero-nanostructures. 18th Materials For Advanced Metallization Conference, Mar 2009, Grenoble, France. ⟨hal-00603881⟩

An innovative NEMS pressure sensor approach based on hetero-nanostructures

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