SOI built-in heat spreader with temperature and pressure integrated sensors for cooling optimization and in-situ monitoring - Université Pierre et Marie Curie Accéder directement au contenu
Communication Dans Un Congrès Année : 2009
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hal-00603884 , version 1 (27-06-2011)

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  • HAL Id : hal-00603884 , version 1

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B. Bercu, L. Montes, P. Morfouli. SOI built-in heat spreader with temperature and pressure integrated sensors for cooling optimization and in-situ monitoring. 8th International Conference on Microtechnology and Thermal Problems in Electronics (MicroTherm'2009), Jul 2009, Lodz, Poland. ⟨hal-00603884⟩
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