Finite elements study of high mechanical stress in nanostructures for innovative NEMS sensors

X. Xu; B. Bercu; L. Montès

Conference Papers Year : 2009

Finite elements study of high mechanical stress in nanostructures for innovative NEMS sensors

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X. Xu

Function : Author

Institut polytechnique de Grenoble - Grenoble Institute of Technology

B. Bercu

Function : Author

L. Montès

Function : Author

Institut des Sciences de la Terre de Paris

Domains

Physics [physics] Condensed Matter [cond-mat] Other [cond-mat.other]

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https://hal.science/hal-00604197

Submitted on : Tuesday, June 28, 2011-2:27:39 PM

Last modification on : Tuesday, November 16, 2021-5:08:44 AM

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hal-00604197 , version 1 (28-06-2011)

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HAL Id : hal-00604197 , version 1

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X. Xu, B. Bercu, L. Montès. Finite elements study of high mechanical stress in nanostructures for innovative NEMS sensors. 4th IEEE International Conference of Nano/Micro Engineered and Molecular Systems, Jan 2009, Shenzhen, China. ⟨hal-00604197⟩

Finite elements study of high mechanical stress in nanostructures for innovative NEMS sensors

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