Finite elements study of high mechanical stress in nanostructures for innovative NEMS sensors - Archive ouverte HAL Access content directly
Conference Papers Year : 2009

Finite elements study of high mechanical stress in nanostructures for innovative NEMS sensors

(1) , , (2)
1
2
Not file

Dates and versions

hal-00604197 , version 1 (28-06-2011)

Identifiers

  • HAL Id : hal-00604197 , version 1

Cite

X. Xu, B. Bercu, L. Montès. Finite elements study of high mechanical stress in nanostructures for innovative NEMS sensors. 4th IEEE International Conference of Nano/Micro Engineered and Molecular Systems, Jan 2009, Shenzhen, China. ⟨hal-00604197⟩
58 View
0 Download

Share

Gmail Facebook Twitter LinkedIn More