A comparative study of reduced-order modeling techniques for nonlinear MEMS beams

Jerome Juillard (1)

1 E3S - Supélec Sciences des Systèmes

This paper is dedicated to the comparison of three techniques of reduced-order modeling(ROM) that may be applied to MEMS beams subject to nonlinear damping and restoring forces.These methods are compared in terms of simplicity and accuracy, in the static, transient andsteady-state regimes. It is shown that one of the most popular ROM methods may lead todramatically wrong results in the case of single-mode decomposition.

Mots clés: Reduced-order modeling; electrostatic nonlinearity

Domaines: Micro et nanotechnologies/Microélectronique; Systèmes dynamiques [math.DS]

Jerome Juillard. A comparative study of reduced-order modeling techniques for nonlinear MEMS beams. DTIP 2014, Apr 2014, Cannes, France. pp.261-265. ⟨hal-01083889⟩