Non-contact XUV metrology of Ru/B 4 C multilayer optics by means of Hartmann wavefront analysis

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Submitted on : Monday, April 23, 2018 - 11:18:19 AM
Last modification on : Wednesday, July 3, 2019 - 10:48:03 AM

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Mabel Ruiz-Lopez, Hugo Dacasa, Benoît Mahieu, Magali Lozano, Lu Li, et al.. Non-contact XUV metrology of Ru/B 4 C multilayer optics by means of Hartmann wavefront analysis. Applied optics, Optical Society of America, 2018, 57 (6), ⟨10.1364/AO.57.001315⟩. ⟨hal-01773850⟩

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