Laboratory GIXRF as a tool for fast screening of stratified samples with sub-nanometer thickness -- the example of CrSc multilayer water window optics - ENSTA Paris - École nationale supérieure de techniques avancées Paris Accéder directement au contenu
Article Dans Une Revue Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy [1994-...] Année : 2020

Laboratory GIXRF as a tool for fast screening of stratified samples with sub-nanometer thickness -- the example of CrSc multilayer water window optics

Résumé

Efficient multilayer optics for radiation in the water window range are difficult to manufacture due to extremely small layer thicknesses and severe intermixing of elements between the layers. Therefore, adequate analytics and short feedback loops are of utmost importance for manufacturers to improve performance and efficiency. We show the possibility for non-destructive elemental depth profiling with commercial laboratory equipment using four real-life CrSc multilayer samples. Comparative measurements at the laboratory of PTB at the synchrotron radiation facility BESSY II validate the results and prove the potential of laboratory equipment for the fast and reliable analysis of stratified materials with sub-nanometer layer thicknesses.

Dates et versions

hal-02892970 , version 1 (07-07-2020)

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Veronika Szwedowski-Rammert, Philipp Hönicke, Meiyi Wu, Ulrich Waldschläger, Armin Gross, et al.. Laboratory GIXRF as a tool for fast screening of stratified samples with sub-nanometer thickness -- the example of CrSc multilayer water window optics. Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy [1994-..], 2020, 174, pp.105995. ⟨10.1016/j.sab.2020.105995⟩. ⟨hal-02892970⟩
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