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Journal articles
Wavefront Sensing for Evaluation of Extreme Ultraviolet Microscopy
Mabel Ruiz-Lopez
1
Masoud Mehrjoo
1
Barbara Keitel
1
Elke Plönjes
1
Domenico Alj
2
Guillaume Dovillaire
3
Lu Li
4
Philippe Zeitoun
2
Domenico Alj 2
Author
Guillaume Dovillaire 3
Author
Lu Li 4
Author IdHAL : lu-li-loa arXiv : https://arxiv.org/a/Lu Li from LOA
Philippe Zeitoun 2
Author IdHAL : philippe-zeitoun
1
DESY - Deutsches Elektronen-Synchrotron [Hamburg] (Notkestraße 85 D-22607 Hamburg - Germany)
2
LOA - Laboratoire d'optique appliquée (828, boulevard des Maréchaux 91762 Palaiseau Cedex - France)
- ENSTA Paris - École Nationale Supérieure de Techniques Avancées (828, boulevard des Maréchaux 91762 Palaiseau Cedex - France)
- X - École polytechnique (École polytechnique, 91128 Palaiseau Cedex - France)
- CNRS - Centre National de la Recherche Scientifique : UMR7639 (France)
3
Imagine Optic (France)
4
Shenzhen Technology University (Shenzhen 518118 - China)
Document type :
Journal articles
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https://hal-ensta-paris.archives-ouvertes.fr//hal-03052035
Contributor : Pierre Zaparucha Connect in order to contact the contributor
Submitted on : Thursday, December 10, 2020 - 2:15:33 PM
Last modification on : Wednesday, March 10, 2021 - 8:20:01 AM
Contributor : Pierre Zaparucha Connect in order to contact the contributor
Submitted on : Thursday, December 10, 2020 - 2:15:33 PM
Last modification on : Wednesday, March 10, 2021 - 8:20:01 AM
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Identifiers
- HAL Id : hal-03052035, version 1
- DOI : 10.3390/s20226426
Citation
Mabel Ruiz-Lopez, Masoud Mehrjoo, Barbara Keitel, Elke Plönjes, Domenico Alj, et al.. Wavefront Sensing for Evaluation of Extreme Ultraviolet Microscopy. Sensors, MDPI, 2020, 20 (22), pp.6426. ⟨10.3390/s20226426⟩. ⟨hal-03052035⟩
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