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Wavefront Sensing for Evaluation of Extreme Ultraviolet Microscopy

Mabel Ruiz-Lopez 1 Masoud Mehrjoo 1 Barbara Keitel 1 Elke Plönjes 1 Domenico Alj 2 Guillaume Dovillaire 3 Lu Li 4 Philippe Zeitoun 2 
1 DESY - Deutsches Elektronen-Synchrotron [Hamburg]
2 LOA - Laboratoire d'optique appliquée
3 Imagine Optic
4 Shenzhen Technology University
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https://hal-ensta-paris.archives-ouvertes.fr/hal-03052035
Contributor : Pierre Zaparucha Connect in order to contact the contributor
Submitted on : Thursday, December 10, 2020 - 2:15:33 PM
Last modification on : Wednesday, May 11, 2022 - 3:22:05 PM

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Mabel Ruiz-Lopez, Masoud Mehrjoo, Barbara Keitel, Elke Plönjes, Domenico Alj, et al.. Wavefront Sensing for Evaluation of Extreme Ultraviolet Microscopy. Sensors, 2020, 20 (22), pp.6426. ⟨10.3390/s20226426⟩. ⟨hal-03052035⟩

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