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High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range

Abstract : We present a novel, to the best of our knowledge, Hartmann wave front sensor for extreme ultraviolet (EUV) spectral range with a numerical aperture (NA) of 0.15. The sensor has been calibrated using an EUV radiation source based on gas high harmonic generation. The calibration, together with simulation results, shows an accuracy beyond λ / 39 root mean square (rms) at λ = 32 n m . The sensor is suitable for wave front measurement in the 10 nm to 45 nm spectral regime. This compact wave front sensor is high-vacuum compatible and designed for in situ operations, allowing wide applications for up-to-date EUV sources or high-NA EUV optics.
Keywords : laser XUV sensor
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https://hal-ensta-paris.archives-ouvertes.fr/hal-03052048
Contributor : Pierre Zaparucha Connect in order to contact the contributor
Submitted on : Thursday, December 10, 2020 - 2:23:08 PM
Last modification on : Wednesday, November 23, 2022 - 3:36:30 PM

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Lu Li, Jayanath C P Koliyadu, Hannah Donnelly, Domenico Alj, Olivier Delmas, et al.. High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range. Optics Letters, 2020, 45 (15), pp.4248. ⟨10.1364/OL.396356⟩. ⟨hal-03052048⟩

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