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Journal Articles Optics Letters Year : 2020

High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range

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Abstract

We present a novel, to the best of our knowledge, Hartmann wave front sensor for extreme ultraviolet (EUV) spectral range with a numerical aperture (NA) of 0.15. The sensor has been calibrated using an EUV radiation source based on gas high harmonic generation. The calibration, together with simulation results, shows an accuracy beyond λ / 39 root mean square (rms) at λ = 32 n m . The sensor is suitable for wave front measurement in the 10 nm to 45 nm spectral regime. This compact wave front sensor is high-vacuum compatible and designed for in situ operations, allowing wide applications for up-to-date EUV sources or high-NA EUV optics.

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Dates and versions

hal-03052048 , version 1 (10-12-2020)

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Cite

Lu Li, Jayanath C P Koliyadu, Hannah Donnelly, Domenico Alj, Olivier Delmas, et al.. High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range. Optics Letters, 2020, 45 (15), pp.4248. ⟨10.1364/OL.396356⟩. ⟨hal-03052048⟩
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