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authFullName_s : Françoise Varniere

Characterization and optimization of magnetron sputtered Sc/Si multilayers for extreme ultraviolet optics

J. Gautier , Franck Delmotte , F. Bridou , M. F. Ravet , Françoise Varniere et al.
Applied physics. A, Materials science & processing, 2007, 88 (4), pp.719-725. ⟨10.1007/s00339-007-4041-6⟩
Journal articles istex hal-01288811v1