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Structure: Internal structure identifier : 1058694

High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range

Lu Li , Jayanath C P Koliyadu , Hannah Donnelly , Domenico Alj , Olivier Delmas et al.
Optics Letters, 2020, 45 (15), pp.4248. ⟨10.1364/OL.396356⟩
Journal articles hal-03052048v1