Non-contact XUV metrology of Ru/B 4 C multilayer optics by means of Hartmann wavefront analysis - Archive ouverte HAL Access content directly
Journal Articles Applied optics Year : 2018

Non-contact XUV metrology of Ru/B 4 C multilayer optics by means of Hartmann wavefront analysis

(1, 2) , (3) , (3) , (3) , (3) , (3) , (1)
1
2
3

Dates and versions

hal-01773850 , version 1 (23-04-2018)

Identifiers

Cite

Mabel Ruiz-Lopez, Hugo Dacasa, Benoît Mahieu, Magali Lozano, Lu Li, et al.. Non-contact XUV metrology of Ru/B 4 C multilayer optics by means of Hartmann wavefront analysis. Applied optics, 2018, 57 (6), ⟨10.1364/AO.57.001315⟩. ⟨hal-01773850⟩
92 View
0 Download

Altmetric

Share

Gmail Facebook Twitter LinkedIn More